摘要
制备了SnO2:Sb(6%,摩尔分数)靶材和一系列不同摩尔比的CeO2-TiO2靶材;以所制靶材用射频磁控溅射法在普通玻璃基片上沉积了CeO2-TiO2单层和CeO2-TiO2/SnO2:Sb双层薄膜。用紫外-可见光谱、Raman光谱、X射线光电子能谱和X射线衍射对CeO2-TiO2薄膜进行了表征。结果表明:在CeO2/TiO2摩尔比为0.5:0.5和0.6:0.4时沉积得到的CeO2-TiO2薄膜为非晶态结构,并具有高的紫外吸收(平均值>99%)和高的可见光透过率(平均值>80%)。在CeO2-TiO2薄膜表面存在Ce4+,Ce3+和Ti4+。对CeO2-TiO2/SnO2:Sb双层薄膜,除具有高的紫外吸收(平均值>99%)和可见光透过率(平均值>75%)性能外,还具有导电性,方块电阻在80～90?/□之间,电阻率在(3.2～3.6)×10-3??cm之间。该双层镀膜玻璃具有截止紫外线和透明导电双功能。
SnO2：Sb（6%, in mole） target, and a series of CeO2-TiO2 targets with different molar ratios of CeO2 to TiO2 were prepared. By using these targets, CeO2-TiO2 films and CeO2-TiO2/SnO2：Sb films were deposited on soda-lime glass substrates by radio frequency magnetron sputtering. The CeO2-TiO2 films were characterized by ultraviolet （UV）-visible transmission spectroscopy, Raman spectroscopy, X-ray photoelectron spectroscopy and X-ray diffraction. The results show that the structure of the CeO2-TiO2 films, deposited with the n（CeO2） ： n（TiO2）=0.5：0.5 and 0.6：0.4 targets, appears amorphous phases, and has high UV absorption（average value〉99%）, and high visible light transmission （average value〉80%）.There are Ce^3＋,Ce^4＋and Ti^4＋on the surface of the films. The CeO2-TiO2/SnO2：Sb double films show high UV absorption（average value〉99%）, high visible light transmission （average value〉75%）, as well as good conductivity. The sheet resistance of the double films is about 80-90Ω/□, and there electrical resistiv- ity is about （3.2-3.6）×10^-3Ω·cm. The soda-lime glass coated with these double functional films has the properties of ultraviolet-cutoff and transparent conduction.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
2006年第10期1182-1186,共5页
Journal of The Chinese Ceramic Society
基金
武汉理工大学2005年博士基金资助项目
关键词
铈钛混合氧化物/掺锑氧化锡薄膜
紫外线截止/透明导电玻璃
射频磁控溅射
cerium and titanium mixing oxide/antimony doped stannic oxide thin films
ultraviolet-cutoff/transparent and conduction glass
radio frequency magnetron sputtering
