摘要
借助原子力显微镜,选用无针尖探针测量了材料为SCR500的成型点的力学性能,由于成型点的形状为椭球,根据测量方法建立了球-平面探针接触的Johnson-Kendall-Roberts弹性接触模型,考虑到成型点剩余部分形变对结果分析的影响,推算出单个成型点的弹性模量。测量和分析表明,双光子固化成型点的弹性模量大约为宏观材料的1/10。
Using a tipless cantilever, the mechanical properties of SCR500 voxels are measured by AFM.Aeeording to the measuring conditions, the JKR theory is adopted in analyzing the elastic contact between flat tip and spherical voxel top. As voxel shape is ellipes, in calculation of individual voxels＇ elastic modulus, the effects of the rest part into account are taken. From experiments and theoretical analysis, the elastic modulus of individual voxels in sub-micrometer scale is about 10% of the elastic modulus of macro-scale samnle.
出处
《微细加工技术》
2005年第4期31-36,共6页
Microfabrication Technology
基金
国家自然科学基金资助项目(5027514050335050)
关键词
成型点
原子力显微镜
弹性模量
无针尖探针
力学模型
voxels
atomic force microscopy
elastic modulus
tipless cantilever
mechanic model
