摘要
用有限元方法对二维方框形结构位置敏感探测器(position sensitive detector简称PSD)进行了计算和分析,讨论了结构参数、负载等对位置线性度的影响。得到的结论是:光敏区方块电阻与单位长度边框线电阻的比值ν决定了PSD的线性度,ν越大,器件的线性越好,比较适当的取值范围是1 0 <ν<2 0 ,PSD位置换算式中系数k的最佳取值不一定为器件长度之半,负载电阻的存在将导致附加位置误差。
The two dimensional square bordered PSD is calculated and analyzed by the FEM, and the influence of the PSD construction, electrical parameters and the load on the device linearity are discussed. The conclusions are as following: it is the ratio (ν) of the surface resistance per unit square to the border resistor per unit length that decided the device linearity, the higher the ratio, the better the linearity, but the appropriate value is 10<ν<20. The optimal factor κ in the position formula is not exactly the half of the device length, and the load will cause additional position error. ©, 2005, Science Press. All right reserved.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2005年第4期382-385,共4页
Chinese Journal of Scientific Instrument
