摘要
SiC材料具有极为优良的物理化学性能,以SiC材料替代传统Si材料制成的SiC微电子机械系统(MEMS),克服了SiMEMS本身性能的局限性,可满足在高温、高腐蚀等极端条件下的应用。文章综述了近几年SiC薄膜在MEMS中应用的研究进展,详细讨论了薄膜的性能、主要制备方法及微机械加工技术在SiCMEMS的应用。最后,分别举例说明SiC薄膜材料在MEMS中作为保护层和结构层应用的研究现状。
SiC is noted for its excellent physical and chemical properties,SiC MEMS which uses SiC as the candidate for conventional Si, overcome the shortcoming of Si MEMS and can be used in high temperature or erosive environment. In this paper, recent progress of SiC film used in MEMS is reviewed, the characteristics of SiC film, dominating deposition methods and micro mechanical technology are discussing in detail. Finally, current status of research on SiC as structure lay and protective coating are introduced and examples are given respectively
出处
《压电与声光》
CSCD
北大核心
2004年第6期482-484,490,共4页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金资助项目(60371030)
