摘要
概述了利用低温等离子体技术制备有机薄膜的主要方法、特性、应用及研究现状,简要讨论了等离子体工艺条件对薄膜结构和性质的影响,介绍了现代分析技术对有机薄膜结构的表征,阐述了近年来对低温等离子体有机薄膜物理和化学性质,包括表面性质,渗透性,电学和光学性质等方面的研究新进展,并描述了其在工业生产上的一些应用。
In this paper, the basic features of organic thin films prepared by plasma technology are reviewed. Principal synthesis technologies and new developments are taken into account. Effects of plasma technology conditions on the structures and properties of the films are briefly discussed. Modern analytical techniques used for characterization of plasma organic films are also reviewed. Physical properties including surface properties, permeability, electrical and optical properties are concisely described with the emphasis on the studies in recent literature. Some proposed applications of these films in mechanical, electrical and optical industry are presented.
出处
《表面技术》
EI
CAS
CSCD
北大核心
2004年第6期1-3,6,共4页
Surface Technology
基金
国家自然科学基金资助项目(50274065)
关键词
低温等离子体
有机薄膜
表面性质
应用
Cold-plasma
Organic thin films
Surface property
Application
